-
1
-
-
36449001969
-
The GEC reference cell: A defined parallel-plate RF-system for experimental and theoretical studies of plasma processing discharges
-
P. Hargis et al., The GEC reference cell: A defined parallel-plate RF-system for experimental and theoretical studies of plasma processing discharges, Rev. Sci. Inst., vol. 65, no. 1, pp. 140-154, 1994.
-
(1994)
Rev. Sci. Inst.
, vol.65
, Issue.1
, pp. 140-154
-
-
Hargis, P.1
-
2
-
-
0002798108
-
Etch challenges of low-k dielectrics
-
I. Morey and A. Asthana, Etch challenges of low-k dielectrics, Solid State Technol, vol. 42, no. 6, pp. 72-73, 1999.
-
(1999)
Solid State Technol
, vol.42
, Issue.6
, pp. 72-73
-
-
Morey, I.1
Asthana, A.2
-
3
-
-
0027558560
-
Absolute spatially and temporally resolved optical emission measurements of RF glow discharges in argon
-
S. Djurovic, L R. Roberts, M. A. Sobolewski, and L K. Olthoff, Absolute spatially and temporally resolved optical emission measurements of RF glow discharges in argon, J. Res. Nat. Inst. Stand. Technol., vol. 98, pp. 159-180, 1993.
-
(1993)
J. Res. Nat. Inst. Stand. Technol.
, vol.98
, pp. 159-180
-
-
Djurovic, S.1
Roberts, L.R.2
Sobolewski, M.A.3
Olthoff, L.K.4
-
4
-
-
0001545085
-
Two dimensional, argon metastable density measurements in an RF plasma reactor by planar laser-induced fluorescence imaging
-
B. K. McMillin and M. R. Zachariah, Two dimensional, argon metastable density measurements in an RF plasma reactor by planar laser-induced fluorescence imaging, J. Appl. Phys., vol. 77, pp. 5538-5538, 1995.
-
(1995)
J. Appl. Phys.
, vol.77
, pp. 5538-5538
-
-
McMillin, B.K.1
Zachariah, M.R.2
-
5
-
-
0029732254
-
2, C12, and CF4
-
2, C12, and CF4, J. Appl. Phys., vol. 79, no. 1, pp. 77-85, 1996.
-
(1996)
J. Appl. Phys.
, vol.79
, Issue.1
, pp. 77-85
-
-
-
6
-
-
0005696999
-
Optical emission spectroscopy on the gaseous electronics conference RF reference cell
-
3. R. Roberts, Optical emission spectroscopy on the gaseous electronics conference RF reference cell, J. Res. Nat. Inst. Stand. Technol., vol. 100, pp. 353-371, 1995.
-
(1995)
J. Res. Nat. Inst. Stand. Technol.
, vol.100
, pp. 353-371
-
-
Roberts, R.1
-
7
-
-
0000597895
-
2, and Ar/CF4 electrical discharges
-
2, and Ar/CF4 electrical discharges, J. Appl. Phys., vol. 82, no. 6, pp. 2805-2813, 1997.
-
(1997)
J. Appl. Phys.
, vol.82
, Issue.6
, pp. 2805-2813
-
-
Rauf, S.1
Kushner, M.2
-
8
-
-
0031162559
-
The time-resolved two-dimensional profile of a radiofrequency capacitively coupled plasma
-
T. Kitajima, M. Ixawa, N. Nakano, and T. Makabe, The time-resolved two-dimensional profile of a radiofrequency capacitively coupled plasma, J. Phys. D: Appl. Phys., vol. 30, pp. 1783-1789, 1997.
-
(1997)
J. Phys. D: Appl. Phys.
, vol.30
, pp. 1783-1789
-
-
Kitajima, T.1
Ixawa, M.2
Nakano, N.3
Makabe, T.4
-
9
-
-
0041554115
-
A spatially resolved optical emission sensor for plasma etch monitoring
-
S. Shannon, 3. P. Holloway, K. Flippo, and M. L. Brake, A spatially resolved optical emission sensor for plasma etch monitoring, Appl. Phys. Lett., vol. 71, no. 11, pp. 1467-1468, 1997.
-
(1997)
Appl. Phys. Lett.
, vol.71
, Issue.11
, pp. 1467-1468
-
-
Shannon, S.1
Holloway, P.2
Flippo, K.3
Brake, M.L.4
-
10
-
-
0033424580
-
Spatially resolved fluorine actinometry
-
S. Shannon, 3. P. Holloway, and M. L. Brake, Spatially resolved fluorine actinometry, J. Vac. Sci. Tech. A, vol. 17, no. 5, pp. 2703-2708, 1999.
-
(1999)
J. Vac. Sci. Tech. A
, vol.17
, Issue.5
, pp. 2703-2708
-
-
Shannon, S.1
Holloway, P.2
Brake, M.L.3
-
11
-
-
0035216447
-
A reconstruction algorithm for a spatially resolved plasma optical emission spectroscopy sensor
-
3. P. Holloway, S. Shannon, S. M. Sepke, and M. L. Brake, A reconstruction algorithm for a spatially resolved plasma optical emission spectroscopy sensor, J. Quant. Sped. Rod. Transf., vol. 68, no. 1, pp. 101-115, 2001.
-
(2001)
J. Quant. Sped. Rod. Transf.
, vol.68
, Issue.1
, pp. 101-115
-
-
Holloway, P.1
Shannon, S.2
Sepke, S.M.3
Brake, M.L.4
-
13
-
-
0000169154
-
A regularization parameter in discrete ill-posed problems
-
T. Regiska, A regularization parameter in discrete ill-posed problems, SIAM J. Sci. Comput., vol. 17, pp. 740-749, 1996.
-
(1996)
SIAM J. Sci. Comput.
, vol.17
, pp. 740-749
-
-
Regiska, T.1
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