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Volumn 68, Issue 1, 2001, Pages 101-115

Reconstruction algorithm for a spatially resolved plasma optical emission spectroscopy sensor

Author keywords

[No Author keywords available]

Indexed keywords

ALGORITHMS; EMISSION SPECTROSCOPY; FINITE DIFFERENCE METHOD; LIGHT EMISSION; PLASMA APPLICATIONS; TOMOGRAPHY;

EID: 0035216447     PISSN: 00224073     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0022-4073(00)00017-0     Document Type: Article
Times cited : (37)

References (16)
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  • 3
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    • A spatially resolved optical emission sensor for plasma etch monitoring
    • S. Shannon J.P. Holloway K. Flippo M.L. Brake A spatially resolved optical emission sensor for plasma etch monitoring Appl Phys Lett 71 1997 1467 1468
    • (1997) Appl Phys Lett , vol.71 , pp. 1467-1468
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  • 4
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    • Shannon S. Spatially resolved analysis of plasma etching discharges using a novel optical emission spectroscopy sensor. Ph.D. thesis, University of Michigan, 1999.
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    • 85120123595 scopus 로고    scopus 로고
    • Pender J, Buie M, Vincent T, Holloway J, Elta M, Brake ML. Radial optical emission profiles of radio frequency glow discharges. J Appl Phys 1993;74:3590–2.
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    • Hutchinson, I.H.1
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    • A regularization parameter in discrete ill-posed problems
    • T. Reginska A regularization parameter in discrete ill-posed problems SIAM J Sci Comput 17 1996 740 749
    • (1996) SIAM J Sci Comput , vol.17 , pp. 740-749
    • Reginska, T.1
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    • Indirect abel inversions by power series and SALS
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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.