SCOPUS 정보 검색 플랫폼

Integrated Ferroelectrics

Volumn 31, Issue 1-4, 2000, Pages 47-56

Properties of reactively sputtered IrOx for PZT electrode applications

(3) Fox, G R a Sun, S a Takamatsu, T a

a Ramtron International Corporation (United States)

Author keywords

Electrodes; Ferroelectric; Iridium oxide; Lead zirconate titanate; Sputtering; Thin films

Indexed keywords

CRYSTAL STRUCTURE; ELECTRODES; FERROELECTRIC DEVICES; FERROELECTRICITY; LEAD COMPOUNDS; OXYGEN; PHASE TRANSITIONS; SPUTTERING; STRESSES; X RAY DIFFRACTION ANALYSIS;

FERROELECTRIC PROPERTIES; FERROELECTRIC SWITCHING; IRIDIUM OXIDE; LEAD ZIRCONATE TITANATE; REACTIVE SPUTTERING; SHEET RESISTANCE;

IRIDIUM COMPOUNDS;

EID: 0034446084 PISSN: 10584587 EISSN: None Source Type: Journal
DOI: 10.1080/10584580008215639 Document Type: Conference Paper

Times cited : (13)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.