Electrode materials for ferroelectric capacitors: Properties of reactive DC sputtered IrO2 thin films

Materials Research Society Symposium - Proceedings

Volumn 433, Issue , 1996, Pages 139-144

  Balu, Venkatasubramani ^a   Chen, Tung Sheng ^a   Jiang, Bo ^a   Kuah, Shao Hong ^a   Lee, Jack C ^a   Chu, Peir ^a   Jones, Robert E ^a   Zurcher, Peter ^a   Taylor, Deborah J ^a   Gillespie, Sherry ^a  

^a UNIVERSITY OF TEXAS AT AUSTIN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITORS; ELECTRIC CONDUCTIVITY OF SOLIDS; ELECTRODES; IRIDIUM COMPOUNDS; MAGNETRON SPUTTERING; MORPHOLOGY; SPUTTER DEPOSITION; THERMODYNAMIC STABILITY; THIN FILMS;

ELECTRODE MATERIALS; FERROELECTRIC CAPACITORS;

FERROELECTRIC MATERIALS;

EID: 0030397139     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-433-139     Document Type: Conference Paper

References (9)