IrO2/Pb(ZrxTi1-x)O3(PZT)/Pt ferroelectric thin-film capacitors resistant to hydrogen-annealing damage

Japanese Journal of Applied Physics, Part 2: Letters

Volumn 36, Issue 8 PART A, 1997, Pages

  Kushida Abdelghafar, Keiko ^a   Miki, Hiroshi ^a   Yano, Fumiko ^a   Fujisaki, Yoshihisa ^a  

^a HITACHI LTD   (Japan)

Author keywords

Hydrogen anneal; Hysteresis curve; IrO2 electrode; Pb(ZrxTi1 x)O3 ferroelectric capacitor

Indexed keywords

ANNEALING; DIELECTRIC FILMS; ELECTRODES; FERROELECTRIC DEVICES; HYDROGEN; HYSTERESIS; IRIDIUM COMPOUNDS; LEAD COMPOUNDS; PLATINUM; POLARIZATION; THIN FILM DEVICES;

IRIDIUM DIOXIDE; LEAD ZIRCONATE TITANATE;

CAPACITORS;

EID: 0031198725     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.36.l1032     Document Type: Article

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