Preparation of SrBi2(Ta, Nb)2O9 thin films by RF sputtering for ferroelectric memory production

Integrated Ferroelectrics

Volumn 31, Issue 1-4, 2000, Pages 23-33

  Masuda, T ^a   Miyaguchi, Y ^a   Suu, K ^a   Sun, S ^a  

^a ULVAC INC   (Japan)

Author keywords

Compositional control; Ferroelectric thin film; Process stability; Rf magnetron sputtering; SBTN; Uniformity

Indexed keywords

DATA STORAGE EQUIPMENT; FILM PREPARATION; MAGNETRON SPUTTERING; STABILITY; STRONTIUM COMPOUNDS;

COMPOSITIONAL CONTROL; FERROELECTRIC MEMORY PRODUCTION; MULTICHAMBER TYPE PRODUCTION TOOL; RF MAGNETRON SPUTTERING;

FERROELECTRIC THIN FILMS;

EID: 0034446040     PISSN: 10584587     EISSN: None     Source Type: Journal    
DOI: 10.1080/10584580008215637     Document Type: Conference Paper

References (12)