SBTN thin film capacitors prepared by RF-magnetron sputtering

Integrated Ferroelectrics

Volumn 26, Issue 1, 1999, Pages 31-37

  Sun, Shan ^a   Fox, Glen R ^a   Hadnagy, T Domokos ^a  

^a Ramtron International Corporation   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; CAPACITORS; CRYSTAL ORIENTATION; ELECTRIC PROPERTIES; ELECTRODES; MAGNETRON SPUTTERING; PHOTOLITHOGRAPHY; PLATINUM COMPOUNDS; SEMICONDUCTING BISMUTH COMPOUNDS; SEMICONDUCTOR DEVICE MANUFACTURE;

CHEMICAL SOLUTION DEPOSITION; CONVENTIONAL FURNACE ANNEALING; METAL ORGANIC DECOMPOSITION; STRONTIUM BISMUTH TANTALATE NIOBATE;

THIN FILMS;

EID: 0033329354     PISSN: 10584587     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1080/10584589908215607     Document Type: Article

References (12)

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