Pulsed laser ablation synthesis and characterization of layered Sr Bi2 Ta2 O9 films and integration into capacitors for non-volatile memories

Integrated Ferroelectrics

Volumn 14, Issue 1-4, 1997, Pages 51-57

  Thomas, D ^a   Kingon, A I ^a   Auciello, O ^b   Waser, R ^c   Schumacher, M ^c  

^a North Carolina State University   (United States)

^b MCNC   (United States)

^c RWTH AACHEN UNIVERSITY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITORS; COMPOSITION; DIELECTRIC FILMS; LASER ABLATION; LASER PULSES; MICROSTRUCTURE; NONVOLATILE STORAGE; SPUTTER DEPOSITION; STOICHIOMETRY; STRONTIUM COMPOUNDS; SYNTHESIS (CHEMICAL);

POLARIZATION HYSTERESIS LOOPS; PULSED LASER ABLATION DEPOSITION (PLAD);

FERROELECTRIC DEVICES;

EID: 0031378804     PISSN: 10584587     EISSN: None     Source Type: Journal    
DOI: 10.1080/10584589708019976     Document Type: Article

References (8)

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