Effect of surface impurities on the Cu/Ta interface

Thin Solid Films

Volumn 376, Issue 1-2, 2000, Pages 115-123

  Chen, L ^a   Magtoto, N ^a   Ekstrom, B ^a   Kelber, J ^a  

^a UNIVERSITY OF NORTH TEXAS   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ADSORPTION; AUGER ELECTRON SPECTROSCOPY; COPPER; DESORPTION; INTERFACES (MATERIALS); MONOLAYERS; POLYCRYSTALLINE MATERIALS; REACTION KINETICS; SATURATION (MATERIALS COMPOSITION); TANTALUM; THIN FILMS; WETTING;

DIFFUSION BARRIERS; ULTRA-HIGH VACUUM CONDITIONS;

SEMICONDUCTING FILMS;

EID: 0034317209     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(00)01343-2     Document Type: Article

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