Zone-plate-array lithography in the deep ultraviolet

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 16, Issue 6, 1998, Pages 3426-3429

  Djomehri, Ihsan J ^a   Savas, T A ^a   Smith, Henry I ^a  

^a Department of Electrical Engineering and Computer Science   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0007138246     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.590472     Document Type: Article

References (9)

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8. J. M. Florence and L. A. Yoder, Proc. SPIE 2650, 193 (1996); J. B. Sampsell, J. Vac. Sci. Technol. B 12, 3242 (1994).
9. J. M. Florence and L. A. Yoder, Proc. SPIE 2650, 193 (1996); J. B. Sampsell, J. Vac. Sci. Technol. B 12, 3242 (1994).