Surface damage in titanium nitride associated with lateral sputtering by argon cluster ions

Surface and Coatings Technology

Volumn 133-134, Issue , 2000, Pages 253-258

  Perry, Anthony J ^a,f   Bull, Steve J ^b   Dommann, Alex ^c   Rafaja, David ^d   Wood, Blake P ^e   Michler, Markus ^c  

^a AIMS Marketing   (United States)

^b NEWCASTLE UNIVERSITY   (United Kingdom)

^c FHO Fachhochschule Ostschweiz   (Switzerland)

^d CHARLES UNIVERSITY   (Czech Republic)

^e LOS ALAMOS NATIONAL LABORATORY   (United States)

^f AIMS Consulting   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; DEFECTS; HARDNESS; IONS; RESIDUAL STRESSES; SPUTTER DEPOSITION; SURFACE ROUGHNESS;

ARGON CLUSTER IONS; SURFACE DAMAGE;

TITANIUM NITRIDE;

TITANIUM NITRIDE;

EID: 0034310619     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(00)00931-2     Document Type: Article

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