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Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 121, Issue 1-4, 1997, Pages 493-497

Study of Ar cluster ion bombardment of a sapphire surface

(4) Takeuchi, D a Fukushima, K a Matsuo, J a Yamada, I a

a KYOTO UNIVERSITY (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; ION BEAMS; ION BOMBARDMENT; ION IMPLANTATION; RADIATION DAMAGE; SURFACE PHENOMENA;

CLUSTER IONS;

SAPPHIRE;

EID: 0031546211 PISSN: 0168583X EISSN: None Source Type: Journal
DOI: 10.1016/S0168-583X(96)00448-X Document Type: Article

Times cited : (27)

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