Anisotropic etching of SiC

Journal of the Electrochemical Society

Volumn 147, Issue 9, 2000, Pages 3519-3522

  Syvajarvi M ^a   Yakimova, R ^a   Janzen E ^a  

^a LINKÖPING UNIVERSITY   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

ACTIVATION ENERGY; ANISOTROPY; CRYSTAL GROWTH; DISINTEGRATION; DISLOCATIONS (CRYSTALS); DISSOLUTION; ETCHING; MELTING; POTASSIUM COMPOUNDS; SILICON CARBIDE; THERMAL EFFECTS;

MICROPIPES;

SINGLE CRYSTALS;

EID: 0034272440     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.1393930     Document Type: Article

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