Ion distribution functions in an Ar-Cl ECR discharge

Plasma Sources Science and Technology

Volumn 9, Issue 3, 2000, Pages 429-436

  Joyce, Glenn ^a   Lampe, Martin ^a   Fernsler, Richard F ^a   Manheimer, Wallace M ^a  

^a NAVAL RESEARCH LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; CHLORINE; COMPUTATIONAL METHODS; COMPUTER SIMULATION; COMPUTER SOFTWARE; ELECTRIC CHARGE; ELECTRIC DISCHARGES; ELECTRIC FIELD EFFECTS; ELECTRON CYCLOTRON RESONANCE; MAGNETIC FIELD EFFECTS; PLASMA SHEATHS; PLASMA SIMULATION;

COULOMB COLLISIONS; ION DISTRIBUTION FUNCTIONS; SOFTWARE PACKAGE QUASI-RZ;

PLASMA SOURCES;

EID: 0034251432     PISSN: 09630252     EISSN: None     Source Type: Journal    
DOI: 10.1088/0963-0252/9/3/320     Document Type: Article

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