Study on the ions' behavior in an electron cyclotron resonance plasma

Journal of Applied Physics

Volumn 81, Issue 12, 1997, Pages 7734-7738

  Liu, Minghai ^a   Hu, Xiwei ^a   Wu, Hanming ^b  

^a UNIVERSITY OF SCIENCE AND TECHNOLOGY OF CHINA   (China)

^b INSTITUTE OF MECHANICS   (China)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; IONS; MATHEMATICAL MODELS; MONTE CARLO METHODS; PRESSURE; SUBSTRATES; SURFACES; TRANSPORT PROPERTIES; VELOCITY;

ION ANGLE DISTRIBUTION; ION ENERGY DISTRIBUTION; ION VELOCITY DISTRIBUTION; TWO DIMENSIONAL HYBRID MODEL;

PLASMAS;

EID: 0031166030     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.365382     Document Type: Article

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