메뉴 건너뛰기




Volumn 23, Issue 3, 2000, Pages 470-479

S-parameter-measurement-based high-speed signal transient characterization of VLSI interconnects on SiO2-Si substrate

Author keywords

S parameter; Signal delay; Signal transient; Silicon substrate; Transmission line; VLSI interconnect

Indexed keywords

CMOS INTEGRATED CIRCUITS; ELECTRIC DELAY LINES; SCATTERING PARAMETERS; SEMICONDUCTING SILICON; SILICA; SUBSTRATES; TIME DOMAIN ANALYSIS; TRANSMISSION LINE THEORY; VLSI CIRCUITS; WAVEFORM ANALYSIS;

EID: 0034239083     PISSN: 15213323     EISSN: None     Source Type: Journal    
DOI: 10.1109/6040.861562     Document Type: Article
Times cited : (29)

References (37)
  • 1
    • 33748106402 scopus 로고    scopus 로고
    • National technology roadmap semiconductors technology needs
    • "National technology roadmap semiconductors technology needs," SIA Rep., 1997.
    • (1997) SIA Rep.
  • 2
    • 0001144080 scopus 로고    scopus 로고
    • Measurement and modeling of on-chip transmission line effects in a 400 MHz microprocessor
    • Apr.
    • P. J. Restle, K. AI Jenkins, A. Deutch, and P. W. Cook, "Measurement and modeling of on-chip transmission line effects in a 400 MHz microprocessor." IEEE J. Solid State Circuits, vol. 33, pp. 662-665, Apr. 1998.
    • (1998) IEEE J. Solid State Circuits , vol.33 , pp. 662-665
    • Restle, P.J.1    Jenkins, K.A.I.2    Deutch, A.3    Cook, P.W.4
  • 3
    • 0032206398 scopus 로고    scopus 로고
    • Clocking design and analysis for a 600-MHz alpha microprocessor
    • Nov.
    • D. W. Bailey and B. J. Benschneider, "Clocking design and analysis for a 600-MHz alpha microprocessor," IEEE J. Solid State Circuits, vol. 33, pp. 1627-1633, Nov. 1998.
    • (1998) IEEE J. Solid State Circuits , vol.33 , pp. 1627-1633
    • Bailey, D.W.1    Benschneider, B.J.2
  • 4
    • 0032202541 scopus 로고    scopus 로고
    • eff CMOS technology with copper interconnects
    • Nov.
    • eff CMOS technology with copper interconnects," IEEE J. Solid State Circuits, vol. 33, pp. 1609-1616, Nov. 1998.
    • (1998) IEEE J. Solid State Circuits , vol.33 , pp. 1609-1616
    • Akrout, C.1
  • 5
    • 0027222295 scopus 로고
    • Closed-form expressions for interconnection delay, coupling, and crosstalk in VLSI's
    • Jan.
    • T. Sakurai, "Closed-form expressions for interconnection delay, coupling, and crosstalk in VLSI's," IEEE Trans. Electron. Devices, vol. 40, pp. 118-124, Jan. 1993.
    • (1993) IEEE Trans. Electron. Devices , vol.40 , pp. 118-124
    • Sakurai, T.1
  • 6
    • 0031349694 scopus 로고    scopus 로고
    • An analytical model for RLC interconnects
    • Dec.
    • A. B. Kang and S. Muddu, "An analytical model for RLC interconnects," IEEE Trans. Computer-Aided Design, vol. 16, pp. 1507-1514, Dec. 1997.
    • (1997) IEEE Trans. Computer-Aided Design , vol.16 , pp. 1507-1514
    • Kang, A.B.1    Muddu, S.2
  • 7
    • 0026944320 scopus 로고
    • Transient simulation of lossy interconnects based on the recursive convolution formulation
    • Nov.
    • S. Lin and E. Kuh, "Transient simulation of lossy interconnects based on the recursive convolution formulation," IEEE Trans. Circuits Syst., vol. 39, pp. 879-892, Nov. 1992.
    • (1992) IEEE Trans. Circuits Syst. , vol.39 , pp. 879-892
    • Lin, S.1    Kuh, E.2
  • 8
    • 0025414182 scopus 로고
    • Asymptotic waveform evaluation for timing analysis
    • Apr.
    • L. T. Pillage and R. A. Roher, "Asymptotic waveform evaluation for timing analysis," IEEE Trans. Computer-Aided Design, vol. 9, pp. 352-368, Apr. 1990.
    • (1990) IEEE Trans. Computer-Aided Design , vol.9 , pp. 352-368
    • Pillage, L.T.1    Roher, R.A.2
  • 9
    • 34748823693 scopus 로고
    • The transient response of damped linear networks with particular regard to wideband amplifiers
    • Jan.
    • W. C. Elmore, "The transient response of damped linear networks with particular regard to wideband amplifiers," J. Appl. Phys., vol. 19, pp. 55-63, Jan. 1948.
    • (1948) J. Appl. Phys. , vol.19 , pp. 55-63
    • Elmore, W.C.1
  • 11
    • 0024719269 scopus 로고
    • Waveform degradation in VLSI interconnections
    • Aug.
    • H. R. Kaupp, "Waveform degradation in VLSI interconnections," IEEE J. Solid State Circuits, vol. 24, pp. 1150-1153, Aug. 1989.
    • (1989) IEEE J. Solid State Circuits , vol.24 , pp. 1150-1153
    • Kaupp, H.R.1
  • 12
    • 0025416719 scopus 로고
    • Generic linear RC delay modeling for digital CMOS circuits
    • Apr.
    • A. Deng and Y. Shiau, "Generic linear RC delay modeling for digital CMOS circuits," IEEE Trans. Computer-Aided Design, vol. 9, pp. 367-376, Apr. 1990.
    • (1990) IEEE Trans. Computer-Aided Design , vol.9 , pp. 367-376
    • Deng, A.1    Shiau, Y.2
  • 13
    • 0020797359 scopus 로고
    • Approximation of wiring delay in MOSFET LSI
    • Aug.
    • T. Sakurai, "Approximation of wiring delay in MOSFET LSI," IEEE J. Solid State Circuits, vol. SC-18, no. 4, pp. 418-426, Aug. 1983.
    • (1983) IEEE J. Solid State Circuits , vol.SC-18 , Issue.4 , pp. 418-426
    • Sakurai, T.1
  • 14
    • 0031623454 scopus 로고    scopus 로고
    • Layout techniques for minimizing on-chip interconnect self inductance
    • Y. Massoud et al., "Layout techniques for minimizing on-chip interconnect self inductance, "in Proc. ACM/IEEE Design Automat. Conf., 1998, pp. 566-571.
    • (1998) "Proc. ACM/IEEE Design Automat. Conf. , pp. 566-571
    • Massoud, Y.1
  • 15
    • 0031622874 scopus 로고    scopus 로고
    • Layout based frequency dependent inductance and resistance extraction for on-chip interconnect timing analysis
    • B. Krauter and S. Mehrotra, "Layout based frequency dependent inductance and resistance extraction for on-chip interconnect timing analysis," in Proc. ACM/IEEE Design Automat. Conf., 1998, pp. 303-308.
    • (1998) Proc. ACM/IEEE Design Automat. Conf. , pp. 303-308
    • Krauter, B.1    Mehrotra, S.2
  • 17
    • 0026216707 scopus 로고
    • Transient analysis of lossy multiconductor transmission lines in nonlinear circuits
    • Sep.
    • T. S. Blazeck and R. Mittra, "Transient analysis of lossy multiconductor transmission lines in nonlinear circuits," IEEE Trans. Comp., Packag., Manufact. Technol. A, vol. 14, pp. 618-627, Sep. 1991.
    • (1991) IEEE Trans. Comp., Packag., Manufact. Technol. A , vol.14 , pp. 618-627
    • Blazeck, T.S.1    Mittra, R.2
  • 18
    • 0027798939 scopus 로고
    • High-speed VLSI interconnect modeling based on S-parameter measurements
    • Aug.
    • Y. Eo and W. R. Eisenstadt, "High-speed VLSI interconnect modeling based on S-parameter measurements," IEEE Trans. Comp., Packag., Manufact. Technol. B, vol. 16, pp. 555-562, Aug. 1993.
    • (1993) IEEE Trans. Comp., Packag., Manufact. Technol. B , vol.16 , pp. 555-562
    • Eo, Y.1    Eisenstadt, W.R.2
  • 19
    • 0029271355 scopus 로고
    • Simulation and measurements of picosecond signal transients, propagation, and crosstalk on lossy VLSI interconnect
    • Mar.
    • _, "Simulation and measurements of picosecond signal transients, propagation, and crosstalk on lossy VLSI interconnect," IEEE Comp., Packag., Manufact. Technol. A, vol. 18, pp. 215-225, Mar. 1995.
    • (1995) IEEE Comp., Packag., Manufact. Technol. A , vol.18 , pp. 215-225
  • 20
    • 4344577806 scopus 로고
    • A parallel-plate waveguide approach to microminiaturized, planar transmission lines for integrated circuits
    • Aug.
    • H. Guckel et al., "A parallel-plate waveguide approach to microminiaturized, planar transmission lines for integrated circuits," IEEE Trans. Microwave Theory Tech., vol. 15, pp. 468-476, Aug. 1967.
    • (1967) IEEE Trans. Microwave Theory Tech. , vol.15 , pp. 468-476
    • Guckel, H.1
  • 22
    • 0021409192 scopus 로고
    • Characteristics of metal-insulator-semiconductor coplanar waveguides for monolithic microwave circuits
    • Apr.
    • R. Sorrentino, G. Leuzzi, and A. Slbermann, "Characteristics of metal-insulator-semiconductor coplanar waveguides for monolithic microwave circuits," IEEE Trans. Microwave Theory Tech., vol. 32, pp. 410-416, Apr. 1984.
    • (1984) IEEE Trans. Microwave Theory Tech. , vol.32 , pp. 410-416
    • Sorrentino, R.1    Leuzzi, G.2    Slbermann, A.3
  • 23
    • 0020781412 scopus 로고
    • Analysis of slow-wave coplanar waveguide for monolithic integrated circuits
    • Jul.
    • Y. Fukuoka, Y. Shih, and T. Itoh, "Analysis of slow-wave coplanar waveguide for monolithic integrated circuits," IEEE Trans. Microwave Theory Tech., vol. 31, pp. 567-573, Jul. 1983.
    • (1983) IEEE Trans. Microwave Theory Tech. , vol.31 , pp. 567-573
    • Fukuoka, Y.1    Shih, Y.2    Itoh, T.3
  • 24
    • 0025464149 scopus 로고
    • Characterization of MIS structure coplanar transmission lines for investigation of signal propagation in integrated circuits
    • Jul.
    • T. Shibata and E. Sano, "Characterization of MIS structure coplanar transmission lines for investigation of signal propagation in integrated circuits," IEEE Trans. Microwave Theory Tech., vol. 38, pp. 881-890, Jul. 1990.
    • (1990) IEEE Trans. Microwave Theory Tech. , vol.38 , pp. 881-890
    • Shibata, T.1    Sano, E.2
  • 25
    • 0028485890 scopus 로고
    • Quasianalytical analysis of the broadband properties of multiconductor transmission lines on semiconducting substrates
    • Aug.
    • E. Groteluschen, L. S. Dutta, and S. Zaage, "Quasianalytical analysis of the broadband properties of multiconductor transmission lines on semiconducting substrates," IEEE Trans. Comp., Packag., Manufact. Technol. B, vol. 17, pp. 376-382, Aug. 1994.
    • (1994) IEEE Trans. Comp., Packag., Manufact. Technol. B , vol.17 , pp. 376-382
    • Groteluschen, E.1    Dutta, L.S.2    Zaage, S.3
  • 26
    • 0026908091 scopus 로고
    • S-parameter-based IC interconnect transmission line characterization
    • Aug.
    • W. R. Eisenstadt and Y. Eo, "S-parameter-based IC interconnect transmission line characterization," IEEE Trans. Comp., Packag., Manufact. Technol. B, vol. 15, pp. 483-490, Aug. 1992.
    • (1992) IEEE Trans. Comp., Packag., Manufact. Technol. B , vol.15 , pp. 483-490
    • Eisenstadt, W.R.1    Eo, Y.2
  • 27
    • 0032070276 scopus 로고    scopus 로고
    • Time-domain measurement of the electromagnetic properties of materials
    • May
    • C. C. Courtney, "Time-domain measurement of the electromagnetic properties of materials," IEEE Trans. Microwave Theory Tech., vol. 46, pp. 517-522, May 1998.
    • (1998) IEEE Trans. Microwave Theory Tech. , vol.46 , pp. 517-522
    • Courtney, C.C.1
  • 28
    • 0001605883 scopus 로고    scopus 로고
    • Modeling the substrate effect in interconnect line characterisitics of high-speed VLSI circuits
    • Oct.
    • J. Wee et al., "Modeling the substrate effect in interconnect line characterisitics of high-speed VLSI circuits," IEEE Trans. Microwave Theory Tech., vol. 46, pp. 1436-1443, Oct. 1998.
    • (1998) IEEE Trans. Microwave Theory Tech. , vol.46 , pp. 1436-1443
    • Wee, J.1
  • 30
    • 0023979781 scopus 로고
    • Scattering parameter transient analysis of transmission lines loaded with nonliear terminations
    • Mar.
    • J. E. Schutt-Aine and R. Mittra, "Scattering parameter transient analysis of transmission lines loaded with nonliear terminations," IEEE Trans. Microwave Theory Tech., vol. 36, pp. 529-536, Mar. 1988.
    • (1988) IEEE Trans. Microwave Theory Tech. , vol.36 , pp. 529-536
    • Schutt-Aine, J.E.1    Mittra, R.2
  • 31
    • 0031639801 scopus 로고    scopus 로고
    • Nonlinear transient simulation of embedded subnetworks characterized by S-parameters using complex frequency hopping
    • R. Achar, M. Nakhla, and E. Ahmed, "Nonlinear transient simulation of embedded subnetworks characterized by S-parameters using complex frequency hopping," in Proc. IEEE Microwave Theory Tech.-S Int. Microwave Symp. Dig., 1998, pp. 267-270.
    • (1998) Proc. IEEE Microwave Theory Tech.-S Int. Microwave Symp. Dig. , pp. 267-270
    • Achar, R.1    Nakhla, M.2    Ahmed, E.3
  • 32
    • 0031636047 scopus 로고    scopus 로고
    • Identifying S-parameter models in the laplace domain for high frequency multiport linear network
    • A. Verschueren et al., "Identifying S-parameter models in the laplace domain for high frequency multiport linear network," in Proc. IEEE MTT-Symp. Dig., 1998, pp. 25-28.
    • (1998) Proc. IEEE MTT-Symp. Dig. , pp. 25-28
    • Verschueren, A.1
  • 33
    • 0023576614 scopus 로고
    • A new straight-forward calibration and correction procedure for "on-wafer" high frequency S-parameter measurements (45MHz-18GHz)
    • P. J. V. Wijnen, H. R. Claessen, and E. A. Wolsheimer, "A new straight-forward calibration and correction procedure for "on-wafer" high frequency S-parameter measurements (45MHz-18GHz)," in Proc. IEEE BCTM, 1987, pp. 70-73.
    • (1987) Proc. IEEE BCTM , pp. 70-73
    • Wijnen, P.J.V.1    Claessen, H.R.2    Wolsheimer, E.A.3
  • 34
    • 0020113452 scopus 로고
    • Modeling of high-speed, large-signal transistor switching transients from S-parameter measurements
    • Y. Ikawa, W. R. Eisenstadt, and R. W. Dutton, "Modeling of high-speed, large-signal transistor switching transients from S-parameter measurements," IEEE Trans. Electron Devices, vol. ED 29, pp. 669-675, 1982.
    • (1982) IEEE Trans. Electron Devices , vol.ED 29 , pp. 669-675
    • Ikawa, Y.1    Eisenstadt, W.R.2    Dutton, R.W.3
  • 35
    • 0003547182 scopus 로고    scopus 로고
    • Sunnyvale, CA: TMA Corp.
    • MEDICI User's Manual. Sunnyvale, CA: TMA Corp.
    • MEDICI User's Manual
  • 37
    • 0020737036 scopus 로고
    • The modeling of resistive interconnects for integrated circuits
    • Apr.
    • R. Antinone and G. W. Brown, "The modeling of resistive interconnects for integrated circuits," IEEE J. Solid-State Circuits, vol. SC-18, pp. 200-203, Apr. 1983.
    • (1983) IEEE J. Solid-State Circuits , vol.SC-18 , pp. 200-203
    • Antinone, R.1    Brown, G.W.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.