Reduced order model compensator control of species transport in a CVD reactor

Optimal Control Applications and Methods

Volumn 21, Issue 4, 2000, Pages 143-160

  Kepler, G M ^a   Tran, H T ^a   Banks, H T ^a  

^a NORTH CAROLINA STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ABSORPTION; BOUNDARY CONDITIONS; CHEMICAL REACTORS; CHEMICAL VAPOR DEPOSITION; COMPUTATIONAL METHODS; DIFFUSION; LINEAR CONTROL SYSTEMS; STATE ESTIMATION; SUBSTRATES; THEOREM PROVING;

COMPENSATOR CONTROL; DIRICHLET BOUNDARY CONTROL; GAS PHASE REACTIONS; HIGH PRESSURE CHEMICAL VAPOR DEPOSITION; PROPER ORTHOGONAL DECOMPOSITION;

FEEDBACK CONTROL;

EID: 0034223286     PISSN: 01432087     EISSN: None     Source Type: Journal    
DOI: 10.1002/1099-1514(200007/08)21:4<143::AID-OCA671>3.0.CO;2-Y     Document Type: Article

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