Towards closed-loop control of CVD coating micro structure

Materials Science and Engineering: A

Volumn 209, Issue 1-2, 1996, Pages 377-383

  Gevelber, Michael ^a   Toledo Quiñones, Manuel ^a   Bufano, Michael ^a  

^a BOSTON UNIVERSITY   (United States)

Author keywords

Chemical vapour deposition; Closed loop control; Dynamics

Indexed keywords

CLOSED LOOP CONTROL SYSTEMS; COATINGS; CONTROL SYSTEMS; FEEDBACK CONTROL; MICROSTRUCTURE;

CHEMICAL VAPOR DEPOSITION;

EID: 0030145230     PISSN: 09215093     EISSN: None     Source Type: Journal    
DOI: 10.1016/0921-5093(95)10092-x     Document Type: Article

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