Virtual control simulator for closed-loop epitaxial growth

Journal of Crystal Growth

Volumn 175-176, Issue PART 1, 1997, Pages 52-60

  Zhou, J J ^a   Li, Y ^a   Pacheco, D ^a   Lee, H P ^a   Liu, X ^b  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b TSINGHUA UNIVERSITY   (China)

Author keywords

DBR; Growth rate; MBE; Simulation

Indexed keywords

CLOSED LOOP CONTROL SYSTEMS; COMPUTER SIMULATION; INTERFEROMETRY; PYROMETRY; SEMICONDUCTING ALUMINUM COMPOUNDS; SEMICONDUCTING GALLIUM ARSENIDE; THICKNESS CONTROL;

BRAGG REFLECTORS; PYROMETRIC INTERFEROMETRY; VIRTUAL CONTROL SIMULATORS;

MOLECULAR BEAM EPITAXY;

EID: 0031140975     PISSN: 00220248     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0022-0248(96)01223-7     Document Type: Article

References (9)

1. J.A. Roth, presented at 9th Int. Conf, on Molecular Beam Epitaxy Pepperdine University Malibu, California, 5-9 August (1996).
2. Y. Li, J.J. Zhou, P. Thompson, D.L. Sato and H.P. Lee, presented at 9th Int. Conf. on Molecular Beam Epitaxy, Pepperdine University Malibu, California, 5-9 August (1996).
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6. X. Liu, E. Ranalli and H.P. Lee, IEEE Photon. Tech. Lett. 8 (1996) 340.
7. H.P. Lee, Y. Li, D.L. Sato and J.J. Zhou, J. Vac. Sci. Technol. B 14 (1996) 2151; Y.M. Houng, Hewlett Packard Laboratory, private communication.
8. H.P. Lee, Y. Li, D.L. Sato and J.J. Zhou, J. Vac. Sci. Technol. B 14 (1996) 2151; Y.M. Houng, Hewlett Packard Laboratory, private communication.
9. J.J. Zhou, Y. Li, P. Thompson, R. Chu, H.P. Lee, Y.C. Kao and F.G. Celii, presented at the 38th TMS Electron. Mater. Conf. University of California Santa Barbara, 26-28 June (1996), J. Electron. Mater., accepted.