-
1
-
-
0031546822
-
Molecular layer epitaxy by real-time optical process monitoring
-
March 11
-
K.J. Bachmann, C. Höpfner, N. Sukidi, A.E. Miller, C. Harris, D.E. Aspnes, N.A. Dietz, H.T. Tran, S. Beeler, K. Ito, H.T. Banks and U. Rossow, Molecular layer epitaxy by real-time optical process monitoring, Appl. Surf. Sci. 112 (March 11), 38-47, (1997).
-
(1997)
Appl. Surf. Sci.
, vol.112
, pp. 38-47
-
-
Bachmann, K.J.1
Höpfner, C.2
Sukidi, N.3
Miller, A.E.4
Harris, C.5
Aspnes, D.E.6
Dietz, N.A.7
Tran, H.T.8
Beeler, S.9
Ito, K.10
Banks, H.T.11
Rossow, U.12
-
2
-
-
0032472183
-
Real-time monitoring of steady-state pulsed chemical beam epitaxy by p-polarized reflectance
-
K.J. Bachmann, N. Sukidi, C. Höpfner, C. Harris, N.A. Dietz, H.T. Tran, S. Beeler, K. Ito and H.T. Banks, Real-time monitoring of steady-state pulsed chemical beam epitaxy by p-polarized reflectance, J. Crystal Growth 183 (3), 323-337, (1998).
-
(1998)
J. Crystal Growth
, vol.183
, Issue.3
, pp. 323-337
-
-
Bachmann, K.J.1
Sukidi, N.2
Höpfner, C.3
Harris, C.4
Dietz, N.A.5
Tran, H.T.6
Beeler, S.7
Ito, K.8
Banks, H.T.9
-
6
-
-
0003461873
-
-
Pergamon Press, New York
-
J. Hilsenrath, C.W. Beckett, W.S. Benedict, L. Fanno, H.J. Hoge, J.F. Masi, R.l. Nuttall and Y.S. Touloukian, Tables of Thermodynamic and Transport Properties, Pergamon Press, New York, (1960).
-
(1960)
Tables of Thermodynamic and Transport Properties
-
-
Hilsenrath, J.1
Beckett, C.W.2
Benedict, W.S.3
Fanno, L.4
Hoge, H.J.5
Masi, J.F.6
Nuttall, R.L.7
Touloukian, Y.S.8
-
8
-
-
0039449745
-
Feasibility of a vertical reactor for high pressure MOCVD
-
G.M. Kepler, C. Höpfner, J.S. Scroggs and K.J. Bachmann, Feasibility of a vertical reactor for high pressure MOCVD, Mater. Sci. Eng. B 57, 9-17, (1998).
-
(1998)
Mater. Sci. Eng. B
, vol.57
, pp. 9-17
-
-
Kepler, G.M.1
Höpfner, C.2
Scroggs, J.S.3
Bachmann, K.J.4
-
10
-
-
0026932112
-
Flow regime map and deposition rate uniformity in vertical rotating-disk OMVPE reactors
-
C.R. Biber, C.A. Wang and S. Motakef, Flow regime map and deposition rate uniformity in vertical rotating-disk OMVPE reactors, J. Crystal Growth 123 (3/4), 545-554, (1992).
-
(1992)
J. Crystal Growth
, vol.123
, Issue.3-4
, pp. 545-554
-
-
Biber, C.R.1
Wang, C.A.2
Motakef, S.3
-
11
-
-
0025430104
-
Transport phenomena in vertical reactors for metalorganic vapor phase epitaxy
-
D.I. Fotiadis and S. Kieda, Transport phenomena in vertical reactors for metalorganic vapor phase epitaxy, J. Crystal Growth 102 (3), 441-470, (1990).
-
(1990)
J. Crystal Growth
, vol.102
, Issue.3
, pp. 441-470
-
-
Fotiadis, D.I.1
Kieda, S.2
-
12
-
-
0028762073
-
Mechanical, thermal and flow dynamics issues in compound semiconductor MOCVD reactor design
-
A.I. Gurary, G.S. Tompa, A.G. Thompson, R.A. Stall, P.A. Zawadzki and N.E. Schumaker, Mechanical, thermal and flow dynamics issues in compound semiconductor MOCVD reactor design, J. Crystal Growth 145 (1-4), 642-649, (1994).
-
(1994)
J. Crystal Growth
, vol.145
, Issue.1-4
, pp. 642-649
-
-
Gurary, A.I.1
Tompa, G.S.2
Thompson, A.G.3
Stall, R.A.4
Zawadzki, P.A.5
Schumaker, N.E.6
-
13
-
-
0030647574
-
Design and operating considerations for a water-cooled close-spaced reactant injector in a production scale MOCVD reactor
-
D.W. Weyburne and B.S. Ahern, Design and operating considerations for a water-cooled close-spaced reactant injector in a production scale MOCVD reactor, J. Crystal Growth 170 (1-4), 77-82, (1997).
-
(1997)
J. Crystal Growth
, vol.170
, Issue.1-4
, pp. 77-82
-
-
Weyburne, D.W.1
Ahern, B.S.2
-
14
-
-
0030653410
-
Heat transfer and mass transport in a multiwafer MOVPE reactor: Modelling and experimental studies
-
T. Bergunde, M. Dauelsberg, L. Kadinski, Yu.N. Makarov, M. Weyers, D. Schmitz, G. Strauch and H. Jürgensen, Heat transfer and mass transport in a multiwafer MOVPE reactor: Modelling and experimental studies, J. Crystal Growth 170 (1-4), 66-71, (1997).
-
(1997)
J. Crystal Growth
, vol.170
, Issue.1-4
, pp. 66-71
-
-
Bergunde, T.1
Dauelsberg, M.2
Kadinski, L.3
Makarov, Y.N.4
Weyers, M.5
Schmitz, D.6
Strauch, G.7
Jürgensen, H.8
-
15
-
-
0025698286
-
Decomposition mechanisms of trimethylgallium
-
C.A. Larsen, N.I. Buchan, S.H. Li and G.B. Stringfellow, Decomposition mechanisms of trimethylgallium, J. Crystal Growth 102 (1/2), 103-116, (1990).
-
(1990)
J. Crystal Growth
, vol.102
, Issue.1-2
, pp. 103-116
-
-
Larsen, C.A.1
Buchan, N.I.2
Li, S.H.3
Stringfellow, G.B.4
-
17
-
-
0343546122
-
Heteroepitaxial processes at low and elevated pressures
-
Edited by N. Ramachandran, SPIE Proceedings Series Bellingham, WA
-
K.J. Bachmann and G.M. Kepler, Heteroepitaxial processes at low and elevated pressures, in Materials Research in Low Gravity, (Edited by N. Ramachandran), pp. 64-74, SPIE Proceedings Series 3123, Bellingham, WA, (1997).
-
(1997)
Materials Research in Low Gravity
, vol.3123
, pp. 64-74
-
-
Bachmann, K.J.1
Kepler, G.M.2
|