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Volumn 29, Issue 8, 1999, Pages 65-80

Optimal design of a high pressure organometallic chemical vapor deposition reactor

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EID: 0033120198     PISSN: 08957177     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0895-7177(99)00071-0     Document Type: Article
Times cited : (5)

References (17)
  • 10
    • 0026932112 scopus 로고
    • Flow regime map and deposition rate uniformity in vertical rotating-disk OMVPE reactors
    • C.R. Biber, C.A. Wang and S. Motakef, Flow regime map and deposition rate uniformity in vertical rotating-disk OMVPE reactors, J. Crystal Growth 123 (3/4), 545-554, (1992).
    • (1992) J. Crystal Growth , vol.123 , Issue.3-4 , pp. 545-554
    • Biber, C.R.1    Wang, C.A.2    Motakef, S.3
  • 11
    • 0025430104 scopus 로고
    • Transport phenomena in vertical reactors for metalorganic vapor phase epitaxy
    • D.I. Fotiadis and S. Kieda, Transport phenomena in vertical reactors for metalorganic vapor phase epitaxy, J. Crystal Growth 102 (3), 441-470, (1990).
    • (1990) J. Crystal Growth , vol.102 , Issue.3 , pp. 441-470
    • Fotiadis, D.I.1    Kieda, S.2
  • 12
  • 13
    • 0030647574 scopus 로고    scopus 로고
    • Design and operating considerations for a water-cooled close-spaced reactant injector in a production scale MOCVD reactor
    • D.W. Weyburne and B.S. Ahern, Design and operating considerations for a water-cooled close-spaced reactant injector in a production scale MOCVD reactor, J. Crystal Growth 170 (1-4), 77-82, (1997).
    • (1997) J. Crystal Growth , vol.170 , Issue.1-4 , pp. 77-82
    • Weyburne, D.W.1    Ahern, B.S.2
  • 17
    • 0343546122 scopus 로고    scopus 로고
    • Heteroepitaxial processes at low and elevated pressures
    • Edited by N. Ramachandran, SPIE Proceedings Series Bellingham, WA
    • K.J. Bachmann and G.M. Kepler, Heteroepitaxial processes at low and elevated pressures, in Materials Research in Low Gravity, (Edited by N. Ramachandran), pp. 64-74, SPIE Proceedings Series 3123, Bellingham, WA, (1997).
    • (1997) Materials Research in Low Gravity , vol.3123 , pp. 64-74
    • Bachmann, K.J.1    Kepler, G.M.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.