Simulation of a vertical reactor for high pressure organometallic chemical vapor deposition

Materials Science and Engineering B

Volumn 57, Issue 1, 1998, Pages 9-17

  Kepler, G M ^a   Hopfner C ^a   Scroggs, J S ^a   Bachmann, K J ^a  

^a NORTH CAROLINA STATE UNIVERSITY   (United States)

Author keywords

Above atmosphere pressure; Compressible flow; Numerical simulation; Organometallic chemical vapor deposition; Vertical reactor

Indexed keywords

CHEMICAL REACTORS; COMPRESSIBLE FLOW; COMPUTER SIMULATION; COOLING; HIGH PRESSURE ENGINEERING; ORGANOMETALLICS;

VERTICAL REACTOR;

METALLORGANIC CHEMICAL VAPOR DEPOSITION;

EID: 0039449745     PISSN: 09215107     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0921-5107(98)00256-6     Document Type: Article

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