Perfect alignment of self-organized Ge islands on pre-grown Si stripe mesas

Applied Physics A: Materials Science and Processing

Volumn 70, Issue 5, 2000, Pages 551-554

  Jin, G ^a   Liu, J L ^a   Thomas, S G ^a   Luo, Y H ^a   Wang, K L ^a   Nguyen, B Y ^b  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b MOTOROLA INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL ORIENTATION; MOLECULAR BEAM EPITAXY; NUCLEATION; SEMICONDUCTING GERMANIUM; SEMICONDUCTING SILICON; SUBSTRATES;

SELECTIVE EPITAXIAL GROWTH; SELF ORGANIZED ISLANDS;

SEMICONDUCTOR DEVICE STRUCTURES;

EID: 0034187152     PISSN: 09478396     EISSN: None     Source Type: Journal    
DOI: 10.1007/s003390051078     Document Type: Article

References (20)

1. H. Luth: Physics of Semiconductor Devices, Vol. 1 ed. by V. Kumar, S.K. Agarwal (Narosa Delhi, India 1998) pp. 18-25; Appl. Surf. Sci. 130-132, 855 (1998)
2. H. Luth: Physics of Semiconductor Devices, Vol. 1 ed. by V. Kumar, S.K. Agarwal (Narosa Delhi, India 1998) pp. 18-25; Appl. Surf. Sci. 130-132, 855 (1998)
3. M. Zinke-Allmang, L.C. Feldman, S. Nakahara, B.A. Davidson: Phys. Rev. B 39, 7848 (1989)
4. S. Guha, A. Madhukar, K.C. Rajkumar: Appl. Phys. Lett. 57, 2110 (1990)
5. J. Eaglesham, M. Cerullo: Phys. Rev. Lett. 64, 1943 (1990)
6. J. Tersoff, F.K. LeGoues: Phys. Rev. Lett. 72, 3570 (1994); G. MedeirosRibeiro, F.G. Pikus, P.M. Petroff, A.L. Efros: Phys. Rev. B 55, 1568 (1997)
7. J. Tersoff, F.K. LeGoues: Phys. Rev. Lett. 72, 3570 (1994); G. MedeirosRibeiro, F.G. Pikus, P.M. Petroff, A.L. Efros: Phys. Rev. B 55, 1568 (1997)
8. X. Wang, Z.M. Jiang, H.J. Zhu, F. Lu, D. Huang, X. Liu, C.W. Hu, Y. Chen, Z. Zhu, T. Kao: Appl. Phys. Lett. 71, 3543 (1997)
9. C.S. Lent, P.D. Tougaw, W. Porod, G.H. Bernstein: Nanotechnology 4, 19 (1993)
10. A.O. Orlov, I. Amlani, G.H. Berstein, C.S. Lent, G.L. Snider: Science 277, 928 (1997)
11. K. Sakamoto, H. Matsuhata, M.O. Tanner, D. Wang, K.L. Wang: Thin Solid Films, 321, 55 (1998)
12. Y.H. Xie, S.B. Samavedam, M. Bulsara, T.A. Langdo, E.A. Fitzgerald: Appl. Phys. Lett. 71, 3567 (1997)
13. L. Vescan, W. Jager, C. Dicker, K. Schmitt, A. Hartmann, H. Luth: Mater. Res. Soc. Symp. Proc. 263, 23 (1992)
14. J.L. Liu, W.G. Wu, A. Balandin, G.L. Jin, K.L. Wang: Appl. Phys. Lett. 74, 185 (1999)
15. T.I. Kamins, R.S. Williams: Appl. Phys. Lett. 71, 1201 (1997)
16. Q. Xiang, S.Z. Li, D.W. Wang, K.L. Wang: J. Vac. Sci. Technol. B 14, 2381 (1996)
17. T.I. Kamins, E.C. Carr, R.S. Williams, S.J. Rosner: J. Appl. Phys. 81, 211 (1997)
18. V.A. Shchukin, N.N. Ledentsov, P.S. Kop'ev, D. Bimberg: Phys. Rev. Lett. 75, 2968 (1995)
19. L. Vescan: Phantoms Newslett. 16, 1 (1999)
20. A. Madhukar: Thin Solid Films 231, 8 (1993)