Molybdenum-ruthenium/beryllium multilayer coatings

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 18, Issue 2, 2000, Pages 557-559

  Bajt, Saša ^a  

^a LAWRENCE LIVERMORE NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS ALLOYS; BERYLLIUM; MOLYBDENUM ALLOYS; MULTILAYERS; PHYSICAL PROPERTIES; POLYCRYSTALLINE MATERIALS; REFLECTION; SPECTRUM ANALYSIS;

MOLYBDENUM RUTHENIUM; SMOOTHING PROPERTIES; ULTRAVIOLET LITHOGRAPHY;

REFLECTIVE COATINGS;

EID: 0034156443     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.582224     Document Type: Article

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