Ultrasmooth, conducting films composed of Mo/Si multilayers

Materials Research Society Symposium - Proceedings

Volumn 403, Issue , 1996, Pages 183-188

  Stearns, D G ^a   Baker, S L ^a   Wall, M A ^a  

^a LAWRENCE LIVERMORE NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHARACTERIZATION; ELECTRIC CONDUCTIVITY; ELECTRON TRANSPORT PROPERTIES; FABRICATION; MAGNETRON SPUTTERING; MATHEMATICAL MODELS; MICROSTRUCTURE; MULTILAYERS; SPUTTER DEPOSITION; SURFACE ROUGHNESS; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION;

FOUR POINT PROBE; HIGH RESOLUTION TRANSMISSION ELECTRON MICROSCOPY; MOLYBDENUM SILICON MULTILAYERS; ROOT MEAN SQUARE;

SEMICONDUCTING FILMS;

EID: 0030378560     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (2)