Experiments of highly emissive metal-oxide-semiconductor electron tunneling cathode

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 14, Issue 3, 1996, Pages 2096-2099

  Yokoo, Kuniyoshi ^a   Koshita, Gen ^a   Hanzawa, Satoru ^a   Abe, Yoshiaki ^a   Neo, Yoichiro ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0004550853     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.588878     Document Type: Article

References (5)

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3. J. Cohen, Appl. Phys. Lett. 1, 61 (1962).
4. K. Yokoo et al., J. Vac. Sci. Technol. B 12, 801 (1994).
5. K. Yokoo et al., J. Vac. Sci. Technol. B 11, 429 (1993).