Fabrication of ultra-thin free-standing chromium foils supported by a Si3N4 membrane-structure with search pattern

Microelectronic Engineering

Volumn 46, Issue 1, 1999, Pages 435-438

  Stepanov, I S ^a,b   Van Aken, R H ^a   Zuiddam, M R ^a   Hagen, C W ^a  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

^b INSTITUTE OF MICROELECTRONICS TECHNOLOGY AND HIGH PURITY MATERIALS   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

CHROMIUM; ELECTRON BEAM LITHOGRAPHY; ELECTRON GUNS; EVAPORATION; METAL FOIL; PLASMA ETCHING; SCANNING TUNNELING MICROSCOPY;

SEARCH PATTERNS;

MICROELECTRONIC PROCESSING;

EID: 0033130784     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-9317(99)00127-6     Document Type: Article

References (3)

1. 1. E.G. Borgonjen, G.P.E.M van Bakel, C.W. Hagen, P. Kruit, Applied Surface Science 111, 165 (1997).
2. 2. G.P.E.M. van Bakel, E.G. Borgonjen, C.W. Hagen, P. Kruit, Journal of Applied Physics 83, 4279(1998).
3. 3. V.V. Aristov, V.V. Kazmiruk, V.A. Kudryashov, V.I. Levashov, S.I. Red'kin, C.W. Hagen, P. Kruit, Surface Science 402-404, 337 (1998).