A novel sensitive scheme for determining the optical parameters of thin films by p-polarized reflectance

Measurement Science and Technology

Volumn 11, Issue 4, 2000, Pages

  Gu, Zhengtian ^a   Liang, Peihui ^a   Liu, Xiaolin ^a   Zhang, Weiqing ^a  

^a SHANGHAI INSTITUTE OF OPTICS AND FINE MECHANICS   (China)

Author keywords

CCD; Extinction coefficient; Film measurement; Film thickness; Optical parameter; p polarized beam; Photochemical sensor; Reflectance ratio; Refractive index; Surface analysis

Indexed keywords

CHARGE COUPLED DEVICES; CHEMICAL SENSORS; LASER BEAMS; LIGHT MODULATION; LIGHT POLARIZATION; LIGHT REFLECTION; OPTICAL GLASS; OPTICAL SENSORS; PHOTOCHEMICAL REACTIONS; REFRACTIVE INDEX; SENSITIVITY ANALYSIS; THIN FILMS;

PHOTOCHEMICAL SENSORS;

OPTICAL FILMS;

FILM THICKNESS; OPTICAL FEATURE; REFRACTIVE INDEX;

EID: 0034100483     PISSN: 09570233     EISSN: None     Source Type: Journal    
DOI: 10.1088/0957-0233/11/4/402     Document Type: Article

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