Determination of the refractive index and thickness of transparent pellicles by use of the polarization-independent absentee-layer condition

Applied Optics

Volumn 35, Issue 25, 1996, Pages 5040-5043

  Cui, Y ^a,b   Azzam, R M A ^a  

^a UNO College of Engineering   (United States)

^b NONE   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001642733     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.35.005040     Document Type: Article

References (6)

1. W. A. Pliskin and E. E. Conrad, “Nondestructive determination of thickness and refractive index of transparent films, ” IBM J. Res. Dev. 8, 43-51 (1964).
2. 4 films on silicon, ” Solid-State Electron. 10, 625-632 (1967).
3. R. M. A. Azzam, “Polarization-independent reflectance matching (PIRM). A technique for the determination of the refractive index and thickness of the transparent films, ” J. Opt. (Paris) 8, 201-205 (1977).
4. T. Kihara and K. Yokomori, “Simultaneous measurement of the refractive index and thickness of thin films by polarized reflectances, ” Appl. Opt. 29, 5069-5073 (1990).
5. T. Kihara and K. Yokomori, “Simultaneous measurement of the refractive index and thickness of thin films by S-polarized reflectances, ” Appl. Opt. 31, 4482-4487 (1992).
6. R. M. A. Azzam and N. M. Bashara, Ellipsometry and Polarized Light (North-Holland, Amsterdam, 1977).