Nitrogen species from radio frequency plasma sources used for molecular beam epitaxy growth of GaN

Plasma Sources Science and Technology

Volumn 9, Issue 1, 2000, Pages 12-17

  Blantt, A V ^a   Hughes, O H ^a   Cheng, T S ^a   Novikov, S V ^a,b   Foxon, C T ^a  

^a UNIVERSITY OF NOTTINGHAM   (United Kingdom)

^b IOFFE INSTITUTE   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

IONS; MOLECULAR BEAM EPITAXY; NITRIDES; NITROGEN; PLASMA APPLICATIONS; SEMICONDUCTING FILMS; SEMICONDUCTING GALLIUM COMPOUNDS; SEMICONDUCTOR GROWTH;

GALLIUM NITRIDE; RADIO FREQUENCY PLASMA SOURCES;

PLASMA SOURCES;

EID: 0033892945     PISSN: 09630252     EISSN: None     Source Type: Journal    
DOI: 10.1088/0963-0252/9/1/303     Document Type: Article

References (21)

1. Moustakas T D and Molnar R J 1993 Mater. Res. Soc. Symp. Proc. 281 753
2. Wang C and Davis R F 1993 Appl. Phys. Lett. 63 990
3. Lin M E, Zue G, Zhou G L, Green J E and Morkoç H 1993 Appl. Phys. Lett. 63 932
4. Paisley M J, Sitar Z, Yan B and Davis R F 1990 J. Vac. Sci. Technol. B 8 323
5. Strite S and Morkoç H 1992 J. Vac. Sci. Technol. B 10 1237
6. Sellidj A, Ferguson B A, Mattord T J, Streetman B G and Mullins C B 1996 Appl. Phys. Lett. 68 3314
7. He Z Q, Ding X M, Hou X Y and Wang X 1994 Appl. Phys. Lett. 63 315
8. Fu T C, Newman N, Jones E, Chan J S, Liu X, Rubin M D, Cheung N W and Weber E R 1995 J. Electron. Mater. 24 249
9. Hughes W C, Rowland W H Jr, Johnson M A L, Fujita S, Cook J W Jr, Schetzina J F, Ren J and Edmond J A 1995 J. Vac. Sci. Technol. B 13 1571
10. Korakakis D, Ludwig K F and Moustakas T D 1998 Appl. Phys. Lett. 72 1004
11. Vaudo R P, Cook J W and Schetzina J F 1994 J. Cryst. Growth A 138 430
12. Ohtani A, Stevens K S, Kinninburg M and Beresford R 1995 J. Cryst. Growth A 150 902
13. Beresford R 1996 J. Appl. Phys. 79 1292
14. Beresford R, Stevens K S, Cui Q, Schwartzman A and Cheng H 1997 Mater. Res. Soc. Proc. 449 361
15. Fan Z Y and Newman N 1998 J. Vac. Sci. Technol. A 16 2132
16. Berishev I, Kim E and Bensaoula A 1998 J. Vac. Sci. Technol. A 16 2791
17. Ptak A J, Ziemer K S, Millecchia M R, Stinespring C D and Myers T H 1999 MRS Internet J. Nitride Semicond. Res. 4S1 G3.10
18. Ptak A J, Millecchia M R, Myers T H, Ziemer K S and Stinespring C D 1999 Appl. Phys. Lett. 74 3836
19. Hammond R H and Bormann R 1989 Physica C 162-4 703
20. Ehrlich G 1988 Chemistry and Physics of Solid Surfaces VII ed R Vanselow and R F Howe p 1
21. Powell R C, Lee N-E, Kim Y-W and Greene J E 1993 J. Appl. Phys. 73 189