Downstream ion drift in an electron cyclotron resonance plasma process

Journal of Applied Physics

Volumn 79, Issue 3, 1996, Pages 1292-1297

  Beresford, R ^a  

^a Brown University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0343040357     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.361024     Document Type: Article

References (20)

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