Controlled growth of 15R-SiC single crystals by the modified Lely method

Physica Status Solidi (A) Applied Research

Volumn 178, Issue 2, 2000, Pages 645-650

  Schulze, N ^a   Barrett, D ^a,b   Pensl, G ^a  

^a UNIVERSITY OF ERLANGEN NUREMBERG   (Germany)

^b NONE   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BORON; CRYSTAL GROWTH; CRYSTAL STRUCTURE; NITROGEN; SINGLE CRYSTALS; STOICHIOMETRY; SUBLIMATION;

DUAL SEED METHOD; LELY METHOD; SUBLIMATION PHYSICAL VAPOR TRANSPORT METHOD;

SILICON CARBIDE;

EID: 0033734644     PISSN: 00318965     EISSN: None     Source Type: Journal    
DOI: 10.1002/1521-396X(200004)178:2<645::AID-PSSA645>3.0.CO;2-C     Document Type: Article

References (20)

1. R. SCHÖRNER, P. FRIEDRICHS, D. PETERS, and D. STEPHANI, IEEE Electron Devices Lett. 20, 241 (1999).
2. V. V. AFANASEV, M. BASSLER, G. PENSL, and M. SCHULZ, phys. stat. sol. (a) 162, 321 (1997).
3. T. KIMOTO, A. ITOH, and H. MATSUNAMI, phys. stat. sol. (b) 202, 247 (1997).
4. D. L. BARRETT and R. B. CAMPBELL, J. Appl. Phys. 38, 53 (1967).
5. N. SCHULZE, D. L. BARRETT, and G. PENSL, Appl. Phys. Lett. 72, 1632 (1998).
6. N. SCHULZE, D. L. BARRETT, G. PENSL, S. ROHMFELD, and M. HUNDHAUSEN, Mater. Sci. Engng. B 61/62, 44 (1999).
7. V. D. HEYDEMANN, N. SCHULZE, D. L. BARRETT, and G. PENSL, Appl. Phys. Lett. 69, 3728 (1996).
8. D. W. FELDMANN, J. H. PARKER, W. J. CHOYKE, and L. PATTRICK, Phys. Rev. 173, 787 (1968).
9. U. STARKE, J. SCHARDT, J. BERNHARDT, M. FRANKE, and K. HEINZ, Phys. Rev. Lett. 82, 2107 (1999).
10. YU, A. VODAKOV, G. A. LOMAKINA, and E. N. MOKHOV, Soviet Phys. - Solid State 24, 780 (1982).
11. V. D. HEYDEMANN, N. SCHULZE, D. L. BARRETT, and G. PENSL, Diamond Relat. Mater. 6, 1262 (1997).
12. R. SCHAUB, G. PENSL, M. SCHUEZ, and C. HOLM, Appl. Phys. A 34, 2151 (1984).
13. G. PENSL and W. J. CHOYKE, Physica 185B, 264 (1993).
14. G. PENSL and TH. TROFFER, Solid State Phenom. 47/48, 115 (1996).
15. J. TAKAHASHI, N. OHTANI, and M. KANAYA, Jpn. J. Appl. Phys. 34, 4694 (1995).
16. K. ONOUE, T. NISHIKAWA, M. KATSUNO, N. OHTANI, H. YASHIRO, and M. KANAYA, Inst. Phys. Conf. Ser. 142, 65 (1995).
17. V. D. HEYDEMANN, Dissertation, Erlangen 1996.
18. T. KIMOTO, A. ITOH, and H. MATSUNAMI, Appl. Phys. Lett. 67, 2385 (1995).
19. R. B. DINGLE, Phil. Mag. 46, 831 (1955).
20. R. MANSFIELD, Proc. Phys. Soc. B 69, 76 (1956).