Structural and electrical characteristics of oxygen-implanted 6H-SiC

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 169, Issue 1-4, 2000, Pages 1-5

  Wang, Lianwei ^a   Huang, Jipo ^a   Duo, Xinzhong ^a   Song, Zhitang ^a   Lin, Chenglu ^a   Zetterling, Carl Mikael ^b   Östling, Mikael ^b  

^a SHANGHAI INSTITUTE OF MICROSYSTEM AND INFORMATION TECHNOLOGY   (China)

^b ROYAL INSTITUTE OF TECHNOLOGY   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0033721730     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(00)00007-0     Document Type: Article

References (10)

1. G. Müller, G. Krötz, E. Niemann, Sensors and Actuators A 43 (1994) 259.
2. D.M. Brown, E. Downey, M. Grezzo, J. Kretchmer, V. Krishnamurthy, W. Hennessy, G. Michon, Solid State Electron. 59 (1996) 1531.
3. W. Wesch, Nucl. Instr. and Meth. B 116 (1996) 305.
4. T. Kimoto, T. Nakajima, H. Matsunami, T. Nakata, M. Inoue, Appl. Phys. Lett. 69 (1996) 1113.
5. R.K. Nadella, M.A. Capano, Appl. Phys. Lett. 70 (1997) 886.
6. D. Alok, B.J. Baliga, J. Electrochem. Soc. 144 (1997) 1135.
7. D. Alok, B.J. Baliga, J. Electron. Mater. 26 (1997) 134.
8. L.W. Wang, J.P. Huang, C.L. Lin, S.C. Zou, C. Zetterling, M. Ostling, J. Mater. Sci. Lett. 18 (1999) 979.
9. M.G. Grimaldi, L. Calcagno, P. Musumeci, N. Frangis, J. Van Landuyt, J. Appl. Phys. 81 (1997) 7181.
10. Carl-Mikael Zetterling, Ph.D. Thesis, KTH, 1997, Stockholm.