SUZANA: A 3D CAD tool for anisotropically etched silicon microstructures

Proceedings of European Design and Test Conference

Volumn , Issue , 1996, Pages 454-458

  Buettgenbach, S ^a   Than, O ^a  

^a TECHNICAL UNIVERSITY OF BRAUNSCHWEIG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER AIDED DESIGN; COMPUTER SIMULATION; ETCHING; SEMICONDUCTING SILICON; THREE DIMENSIONAL;

SOFTWARE PACKAGE SUZANA;

INTEGRATED CIRCUIT LAYOUT;

EID: 0029757827     PISSN: 10661409     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (19)