LiTaO3 films with c-axis preferred orientation prepared on Si(111) substrate by sol-gel method

Materials Letters

Volumn 44, Issue 3, 2000, Pages 125-129

  Cheng, S D ^a   Zhou, Y ^a   Kam, C H ^a   Han, X Q ^a   Que, W X ^a   Lam, Y L ^a   Chan, Y C ^a   Oh, J T ^b   Gan, W S ^c  

^a Sch Elec Electron Eng   (Singapore)

^b SCHOOL OF APPLIED SCIENCE   (Singapore)

^c Biomanufacturing Sciences and Training Centre   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

COATING TECHNIQUES; FILM PREPARATION; HEAT TRANSFER; OPTICAL PROPERTIES; RAPID THERMAL ANNEALING; SEMICONDUCTING SILICON; SURFACE PHENOMENA; TEMPERATURE; TEXTURES; THIN FILMS; X RAY DIFFRACTION ANALYSIS;

PREHEATING TEMPERATURE; SOL-GEL SPIN COATING;

LITHIUM COMPOUNDS;

EID: 0033700447     PISSN: 0167577X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-577X(00)00014-8     Document Type: Article

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