C-axis lithium niobate thin film growth on silicon using solid-source metalorganic chemical vapor deposition

Journal of Materials Research

Volumn 14, Issue 6, 1999, Pages 2662-2667

  Lee, S Y ^a   Feigelson, R S ^a  

^a Stanford University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL STRUCTURE; LITHIUM NIOBATE; METALLORGANIC CHEMICAL VAPOR DEPOSITION; SILICON; SURFACE ROUGHNESS; TEXTURES; THIN FILMS;

CRYSTALLINITY; OPTICAL LOSSES;

FILM GROWTH;

EID: 0032631503     PISSN: 08842914     EISSN: None     Source Type: Journal    
DOI: 10.1557/JMR.1999.0356     Document Type: Article

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