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Volumn 304, Issue 1-2, 1997, Pages 239-244
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Deposition of LiTaO3 thin films by pyrosol process
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Author keywords
Chemical vapour deposition; Deposition process; Pyrolysis; X ray diffraction
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Indexed keywords
AEROSOLS;
CHEMICAL VAPOR DEPOSITION;
CRYSTAL ORIENTATION;
CRYSTALLIZATION;
LITHIUM COMPOUNDS;
PYROLYSIS;
SAPPHIRE;
SUBSTRATES;
THERMAL EFFECTS;
ULTRASONIC APPLICATIONS;
X RAY CRYSTALLOGRAPHY;
LITHIUM TANTALATE;
PYROSOL PROCESS;
ULTRASONIC SPRAYING;
THIN FILMS;
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EID: 0031192620
PISSN: 00406090
EISSN: None
Source Type: Journal
DOI: 10.1016/S0040-6090(97)00172-7 Document Type: Article |
Times cited : (22)
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References (27)
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