The role of Si3N4 layers in determining the texture of sputter deposited LiNbO3 thin films

Applied Physics Letters

Volumn 68, Issue 19, 1996, Pages 2651-2653

  Tan, S ^a   Schlesinger, T E ^a   Migliuolo, M ^b  

^a CARNEGIE MELLON UNIVERSITY   (United States)

^b Reclaim Facility   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000745282     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.116270     Document Type: Article

References (10)

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