Transmission electron microscopy study of microstructure and misfit dislocations in epitaxial LiTaO3 thin films grown on sapphire by a metalorganic chemical vapor deposition process

Journal of Applied Physics

Volumn 79, Issue 7, 1996, Pages 3675-3680

  Xie, H ^a,b   Lu, Y C ^a,c   Raj, R ^a,c  

^a Cornell University   (United States)

^b NATIONAL SEMICONDUCTOR CORPORATION   (United States)

^c LOS ALAMOS NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0343625730     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.361197     Document Type: Article

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