Sol-gel derived LiTaO3 thin films: Properties and applications

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3136, Issue , 1997, Pages 199-209

  Chen, C J ^a   Jeng, De Yin ^a   Raychaudhuri, S ^a   Uematsu, S ^a   Hasegawa, Y ^a  

^a YTC America Inc   (United States)

Author keywords

Double alkoxide; Film orientation; LiTaO3; Pyroelectric; Sol gel

Indexed keywords

CRYSTALLIZATION; LITHIUM COMPOUNDS; PYROELECTRICITY; SILICON WAFERS; SINTERING; SOL-GELS; SPIN COATING; X RAY DIFFRACTION ANALYSIS;

FILM ORIENTATION;

THIN FILMS;

EID: 0031289285     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.284121     Document Type: Conference Paper

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