Petri-net and GA based approach to modeling, scheduling, and performance evaluation for wafer fabrication

Proceedings - IEEE International Conference on Robotics and Automation

Volumn 4, Issue , 2000, Pages 3403-3408

  Chen, Jyh Horng ^a   Fu, Li Chen ^a   Lin, Ming Hung ^a  

^a NATIONAL TAIWAN UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

HYBRID COLOR TIMED PETRI NET; MACHINE UTILIZATION; REACHABILITY GRAPH; WAFER FABRICATION; WORK IN PROCESS INVENTORY;

COMPUTATIONAL COMPLEXITY; GENETIC ALGORITHMS; MATHEMATICAL MODELS; PERFORMANCE; PETRI NETS; SCHEDULING; SEMICONDUCTOR DEVICE MANUFACTURE; SYSTEMS ANALYSIS;

AUTOMATION;

EID: 0033691406     PISSN: 10504729     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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