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Volumn 593, Issue , 2000, Pages 511-516
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Electrical and structural properties of carbon-nitrogen films
a a a
a
EPFL
(Switzerland)
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Author keywords
[No Author keywords available]
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Indexed keywords
CARBON NITROGEN FILMS;
SPUTTER PLASMA;
ACTIVATION ENERGY;
COMPOSITION EFFECTS;
ELECTRIC PROPERTIES;
MAGNETRON SPUTTERING;
MICROSTRUCTURE;
NANOSTRUCTURED MATERIALS;
NITROGEN;
RUTHERFORD BACKSCATTERING SPECTROSCOPY;
SCANNING TUNNELING MICROSCOPY;
STRUCTURE (COMPOSITION);
TEMPERATURE;
TRANSMISSION ELECTRON MICROSCOPY;
CARBON INORGANIC COMPOUNDS;
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EID: 0033684018
PISSN: 02729172
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
Times cited : (1)
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References (16)
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