Measuring thin film fracture toughness using the indentation sinking-in effect and focused ion beam

Materials Research Society Symposium - Proceedings

Volumn 594, Issue , 2000, Pages 389-394

  Tsui, Ting Y ^a   Joo, Young Chang ^b  

^a MOTOROLA INC   (United States)

^b Seoul National University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

BENDING MOMENTS; CRACK PROPAGATION; FINITE ELEMENT METHOD; FRACTURE TOUGHNESS; ION BOMBARDMENT; MATHEMATICAL MODELS; NICKEL COMPOUNDS; TENSILE STRENGTH; THIN FILMS;

CRACK TIP OPENING DISPLACEMENT (CTOD) MODELS; FOCUSED ION BEAM (FIB) MILLING;

METALLIC FILMS;

EID: 0033657985     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

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