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Volumn 594, Issue , 2000, Pages 295-300
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Tensile properties of amorphous diamond films
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Author keywords
[No Author keywords available]
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Indexed keywords
AMORPHOUS FILMS;
ELASTIC MODULI;
FRACTURE TOUGHNESS;
FRICTION;
HARDNESS;
MICROELECTROMECHANICAL DEVICES;
STIFFNESS;
STRAIN;
STRESS ANALYSIS;
TENSILE STRENGTH;
TENSILE STRESS;
TENSILE TESTING;
NANOINDENTATION TEST;
DIAMOND FILMS;
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EID: 0033645231
PISSN: 02729172
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Article |
Times cited : (5)
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References (13)
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