Flow control by using high-aspect-ratio, in-plane microactuators

Sensors and Actuators, A: Physical

Volumn 73, Issue 1-2, 1999, Pages 169-175

  Sherman, Faiz ^a   Tung, Steve ^a   Kim, Chang Jin ^a   Ho, Chih Ming ^a   Woo, Jason ^b  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b Engineering IV   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ASPECT RATIO; DRAG; ELECTROSTATICS; FLOW CONTROL; REACTIVE ION ETCHING; SILICON ON INSULATOR TECHNOLOGY; SILICON WAFERS; SUBSTRATES; VISCOUS FLOW;

DEEP REACTIVE ION ETCHING (DRIE);

MICROACTUATORS;

EID: 0033537537     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(98)00267-2     Document Type: Article

References (14)

1. Hefner J.N., Bushell D.M. Viscous drag reduction in boundary layers. Progress in Astronautics and Aeronautics. 123:1990;203-324.
2. C.-M. Ho, S. Tung, G.-B. Lee, Y.-C. Tai, F. Jiang, T. Tsao, MEMS - A Technology for Advancements in Aerospace Engineering, 35th Aerospace Science Meeting and Exhibit, Reno, NV, Jan 6-10, 1997, pp. 1-10.
3. T. Tsao, C. Liu, Y.-C. Tai, C.-M. Ho, Micromachined Magnetic Actuator for Active Fluid Control, ASME Int. Mech. Eng. Congress and Expo., Chicago, Il, (1994) pp. 31-38.
4. Ho C.-M., Tai Y.-C. Review: MEMS and its application for flow control. J. Fluids Engineering. 118:1996;437-447.
5. Ho C.-M., Tai Y.-C. Micro-electro-mechanical systems (MEMS) and fluid flows. Annual Review of Fluid Mechanics. 30:1998;579-612.
6. C. Lee, J. Kim, Application of neural networks to turbulence control for drag, Paper submitted to J. Fluid Mechanics.
7. R. Legtenberg, E. Berenschot, M. Elwenspock, J. Fluitman, Electrostatic Curved Electrode Actuators, Proc. IEEE Micro Electro Mechanical System Workshop, Amsterdam, Netherlands, Feb., 1995, pp. 37-42.
8. S. Saffer, J. Simon, C.-J. Kim, Mercury-Contact Switch with Gap-Closing Microcantilever, SPIE Micromachined Devices and Components II, Austin, TX, Oct. 1996, pp. 204-209.
9. MCNC Center for Microelectronics Systems Technologies, Research Triangle Park, NC, USA.
10. G. Mulher, D. Soane, R. Howe, Supercritical Carbon Dioxide Drying of Microstructures, Proc. 7th Int. Conf. Solid-State Sensors and Actuators (Transducer '93), Yokohama, Japan, June, 1993, pp. 296-299.
11. U. Srinivasan, M. Houston, R. Howe, R. Moboudian, Self-assembled Fluorocarbon Films for Enhanced Stiction Reduction, Proc 9th Int. Conf. Solid-State Sensors and Actuators (Transducer '97), Chicago, June, 1997, pp. 1399-1402.
12. B. Sridharan, A Study of Packaging and Surface Passivation for MEMS Devices Masters Thesis, UCLA, June, 1998.
13. J. Kim, C.-J. Kim, Comparative Study of Various Release Methods For Polysilicon Surface Micromachining, Proc. IEEE Micro Electro Mechanical System Workshop, Nagoya, Japan, Jan., 1997, pp. 442-447.
14. C. Lee, J. Kim, Application of Neural Network to Turbulence Control for Drag, Paper submitted to J. Fluid Mechanics, 1998.