Mercury-contact switching with gap-closing microcantilever

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 2882, Issue , 1996, Pages 204-209

  Saffer, Scott ^a   Simon, Jonathan ^a   Kim, Chang Jin ^a   Park, Kyung H ^a   Lee, Jong Hyun ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

MICROCANTILEVERS; POLYSILICON;

ACTUATORS; ELECTRIC CONTACTS; ELECTRODES; ELECTROSTATICS; MERCURY (METAL); SEMICONDUCTING SILICON;

MICROELECTROMECHANICAL DEVICES;

EID: 0030385224     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (11)