Silicon microsystems for automotive applications

European Solid-State Device Research Conference

Volumn , Issue , 1997, Pages 101-115

  Marek, Jiri ^a  

^a ROBERT BOSCH GMBH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

AIR INTAKES; AUTOMOBILE SAFETY DEVICES; MICROELECTRONICS;

AUTOMOTIVE APPLICATIONS; ENVIRONMENTAL REQUIREMENT; EUROPEAN UNION; INTAKE PRESSURE; MICRO-SYSTEM TECHNOLOGIES; MICROMECHANICAL DEVICE; RESEARCH INSTITUTES; SILICON MICROSYSTEM;

MICROSYSTEMS;

EID: 51349137194     PISSN: 19308876     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ESSDERC.1997.194383     Document Type: Conference Paper

References (6)

1. The Electronics Revolution in the Motor Industry. London: The EIU, 1994
2. Kress, H.-J.; Hckel, K.; Schatz, O.; Muchow, J.: Integrated Silicon Pressure Sensor with On-Chip Compensation of Temperature Effects Using Programmable Thyristors. Microsystems, 1994
3. Kress, H.-J.; Marek, J.; Mast, M.; Schatz, O.; Muchow, J.: Integrated Silicon Pressure Sensor for Automotive Application with Electronic Trimming. SAE Paper Nr. 950533, 1995
4. Arand, D.; Marek, J.; Weiblen, K.; Lipphardt, U.: Integrated Barometric Pressure Sensor with SMD Packaging. SAE Technical Paper Series 960756, 1996
5. Offenberg, M.; M nzel, H.; Schubert, D.; Schatz, O.; L rmer, F.; Muller, E.; Maih fer, B.; Marek, J.: Acceleration Sensor in Surface Micromachining for Airbag Applications with High Signal/Noise Ratio. SAE Technical Paper Series, 960758
6. Lutz, M.; Golderer, W.; Gerstenmeier, J.; Marek, J.; Maih fer, B.; Mahler, S.; M nzel, H.; Bischof, U.: A Precision Yaw Rate Sensor in Silicon Micromachining. To be published in Proceedings of Transducers 97 Conference, 1997