Pressure sensors of CVD diamond films

Sensors and Materials

Volumn 11, Issue 1, 1999, Pages 001-012

  Kitabatake, Makoto ^a,b   Deguchi, Masahiro ^a,c  

^a PANASONIC CORPORATION   (Japan)

^b TOHOKU UNIVERSITY   (Japan)

^c OSAKA UNIVERSITY   (Japan)

Author keywords

Chemical vapor deposition; Gauge factor; P type diamond films; Piezoresistive effect

Indexed keywords

EID: 0033482777     PISSN: 09144935     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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