Optical characterization of amorphous dielectric films

Advanced Materials

Volumn 8, Issue 4, 1996, Pages 349-352

  Sassella, Adele ^a  

^a UNIVERSITY OF MILAN   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS FILMS; CHEMICAL BONDS; CHEMICAL VAPOR DEPOSITION; ELECTRONIC PROPERTIES; ELLIPSOMETRY; INFRARED SPECTROSCOPY; MATHEMATICAL MODELS; MOLECULAR VIBRATIONS; NITRIDES; OPTICAL PROPERTIES; REGRESSION ANALYSIS; VOLUME FRACTION;

ABSORPTION COEFFICIENT; LAMBERT BEER LAW; OPTICAL ENERGY GAP; SELLMEIER ANALYTICAL MODEL; SPECTROSCOPIC ELLIPSOMETRY;

DIELECTRIC FILMS;

EID: 0030124940     PISSN: 09359648     EISSN: None     Source Type: Journal    
DOI: 10.1002/adma.19960080414     Document Type: Article

References (11)

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