Determination of refractive-index profiles by a combination of visible and infrared ellipsometry measurements

Applied Optics

Volumn 35, Issue 28, 1996, Pages 5540-5544

  Nguyen Van, V ^a   Brunet Bruneau, A ^a   Fisson, S ^a   Frigerio, J M ^a   Vuye, G ^a   Wang, Y ^a   Abeles F ^a   Rivory, J ^a   Berger, M ^b   Chaton, P ^b  

^a SORBONNE UNIVERSITÉ   (France)

^b Instrumentation   (France)

Author keywords

Ellipsometry; Index gradients; Optical thin films; Silicon oxynitrides

Indexed keywords

EID: 0343615016     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.35.005540     Document Type: Article

References (10)

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