Controllable Nanopit Formation on Si(001) with a Scanning Tunneling Microscope

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 38, Issue 9 A, 1999, Pages 5236-5238

  Ueda, Naotada ^a   Sudoh, Koichi ^a   Li, Nan ^a   Yoshinobu, Tatsuo ^a   Iwasaki, Hiroshi ^a  

^a OSAKA UNIVERSITY   (Japan)

Author keywords

Field evaporation; Nanofabrication; Nanopit; Scanning tunneling microscopy; Silicon

Indexed keywords

ELECTRIC FIELD EFFECTS; NANOSTRUCTURED MATERIALS; NANOTECHNOLOGY; SCANNING TUNNELING MICROSCOPY; SUBSTRATES; VACUUM APPLICATIONS;

NANOSCALE-PIT FORMATION;

SILICON WAFERS;

EID: 0033357477     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.38.5236     Document Type: Article

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